| 摘要 |
PROBLEM TO BE SOLVED: To improve inspection efficiency by increasing the insulation capability among electrodes in the withstand voltage inspection of a high-withstand voltage device and the apparatus cases of a high-voltage generator or the like, and by enabling the withstand voltage inspection in a state of a semiconductor substrate. SOLUTION: A semiconductor wafer 1 is dipped into an insulating solution 22, thus enabling a withstand voltage inspection in a state where insulating resistance is improved among a probe 11P connected to a gate, a 12P connected to an emitter and an electrode 13C connected to a collector, and a container 21. Inspection in the state of a semiconductor wafer 1 can be made, thus increasing inspection efficiency and productivity efficiency.
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