| 摘要 |
PROBLEM TO BE SOLVED: To enable the manufacturing of an evaluation sample easily and in a short time, to enable the execution of reliable evaluation, and to enable the easy identification of a defect. SOLUTION: Storage node contacts are formed in checkers on a silicon substrate by mask patterns 101 disposed in checkers. Thereafter, by storage node patterns 102, storage nodes are disposed on the whole surface like an ordinary cell array. The storage nodes are alternately conducted to the silicon substrate through the storage node contacts. When the evaluation sample is observed by SEM, it is seen a contrast difference by the storage node conducted to the substrate and the storage node being open. |
