| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized variable wavelength device at a low cost wherein transmittance of transmission spectrum is high in a wide band, and superior filter characteristic of narrow spectrum bandwidth is exhibited. SOLUTION: A resonator constituted of a pair of mirrors which are composed of one-dimensional photonic crystal and face parallel with each other, and an electrostatic drive type microactuator are installed on a substrate. The microactuator has a movable electrode integrated in a body with a movable mirror constituting the resonator, a spring for supporting the movable electrode, and a fixed electrode. A fixed end of the spring, the fixed electrode and a fixed mirror are fixed to the substrate. The movable electrode, a part of the spring except the fixed end, and the movable mirror are isolated from the substrate and levitated in the air. When a voltage is applied to a part between the movable electrode and the fixed electrode, an electrostatic force is generated between the electrodes, and the movable electrode makes a translational movement. As a result, the resonator length of the resonator is changed, and a light with desired wavelength is selectively resonance-transmitted out of a plurality of wavelength modulated signal lights. |
