发明名称 ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an electronic device in which the contact resistance across an SiC semiconductor and an electrode is reduced. SOLUTION: The electronic device is provided with a p-type or n-type SiC semiconductor part and a carbon electrode which is installed on the SiC semiconductor part and which contains a carbon nanotube extended from the surface of the SiC semiconductor part.
申请公布号 JP2003100658(A) 申请公布日期 2003.04.04
申请号 JP20010295115 申请日期 2001.09.26
申请人 TOSHIBA CORP 发明人 MIZUKAMI MAKOTO;IMAI SEIJI;SHINOHE TAKASHI
分类号 H01L21/28;H01L21/205;H01L29/06;H01L29/47;H01L29/80;H01L29/861;H01L29/872;(IPC1-7):H01L21/28 主分类号 H01L21/28
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