发明名称 |
ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide an electronic device in which the contact resistance across an SiC semiconductor and an electrode is reduced. SOLUTION: The electronic device is provided with a p-type or n-type SiC semiconductor part and a carbon electrode which is installed on the SiC semiconductor part and which contains a carbon nanotube extended from the surface of the SiC semiconductor part. |
申请公布号 |
JP2003100658(A) |
申请公布日期 |
2003.04.04 |
申请号 |
JP20010295115 |
申请日期 |
2001.09.26 |
申请人 |
TOSHIBA CORP |
发明人 |
MIZUKAMI MAKOTO;IMAI SEIJI;SHINOHE TAKASHI |
分类号 |
H01L21/28;H01L21/205;H01L29/06;H01L29/47;H01L29/80;H01L29/861;H01L29/872;(IPC1-7):H01L21/28 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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