摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor device having fine-patterned resistor elements. SOLUTION: This semiconductor device comprises a pair of first resistor terminals 3 formed on an element-isolation region of a semiconductor substrate, a pair of second resistor terminals 3 formed apart from the pair of the first resistor terminals by a first distance on an element-isolation region, a first resistor part 2 formed between the pair of the first resistor terminals to connect them, having a width narrower than those of the first resistor terminals, and formed on the element-isolation region, a second resistor part 2 formed between the pair of the second resistor terminals to connect them, having a width narrower than those of the second resistor terminals, and formed apart from the first resistor part by a second distance E, which is larger than the first distance, and parallel to the first resistor part, on the element-isolation region, and a dummy electrically-conductive layer 4 formed on the semiconductor substrate or the element-isolation region between the first resistor part and the second resistor part, and not functioning as an element. |