| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-size lighting apparatus ensuring higher light application efficiency by adequately adjusting the length of a reflection type optical integrator and also provide an aligner using the same lighting apparatus and a device manufacturing method. SOLUTION: The lighting apparatus comprises a reflection type optical integrator which is located between a focusing optical system and a region to be lighted and forms a plurality of pairs of reflecting surfaces provided opposed with each other in the shape of cross-section of an m-sided polygon (m: even number) and also reflects the light flux at a plurality of pairs of reflecting surfaces provided opposed with each other. In this lighting apparatus, the length L in the axial direction of the reflection type integrator satisfied the following equation when the refractive index of medium among the reflecting surfaces is defined as n, distance among the reflecting surfaces of a plurality of pairs asϕ, divergence angle when the light flux emitted from the focusing optical system is incident to the reflection type optical integrator asθ, the constant determined in relation to the shape of cross-section of the reflection type optical integrator as C, and the natural number as A, R=ϕ/[tan sin<-1> -(sinθ/n)}], C×(A-0.1)×R<=L<=C×(A+0.1)×R.
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