| 摘要 |
PROBLEM TO BE SOLVED: To provide a support jig which can surely and easily support a substrate without interference with the projected area projected from the device mounted on the substrate or from the substrate surface. SOLUTION: This substrate support jig supports a substrate by placing in contact many support pins to the substrate surface without interference with the projected area projected from the device or substrate surface. The support pins 32 are provided to be movable between the projecting position and the drawing position to the jig body 30a formed in the shape of block by respectively defining, as the stop positions, the projecting position which is in contact with the substrate surface to support the substrate, and the drawing position which is isolated from the device mounted to the substrate. Moreover, the support pin moving manipulation mechanisms 36, 38 are also provided to move, when the substrate mounting the device is set in the condition that the support pins are set to the projecting position, only the support pins 32 pushed from the device of projected area to the drawing position from the projecting position.
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