发明名称 HIGH-PRESSURE TREATING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a high-pressure treating device that performs appropriate treatment by accelerating the dissolution of an auxiliary agent in an SCF and removing auxiliary mist generated when the auxiliary agent is mixed in the SCF. SOLUTION: This high-pressure treating device is provided with an SCF supply section 1, auxiliary agent mixing section 2, auxiliary agent supply section 3, mist separator 4, mist detector 5, and SCF chamber 6. An auxiliary agent supply pipe 8 and an auxiliary agent return pipe 10 are respectively provided with valves 9 and 11. The auxiliary agent mixing section 2 created a two- component SCF from the SCF supplied from the SCF supply section 1 and the auxiliary agent supplied from the auxiliary agent supply section 3, and the mist separator 4 catches the auxiliary agent mist from the two-component SCF and supplies the SCF to the mist detector 5. The detector 5 detects the auxiliary agent mist of the two-component SCF and sends the SCF to the SCF chamber 6 while outputting its detected results to a control section 7.
申请公布号 JP2003100690(A) 申请公布日期 2003.04.04
申请号 JP20010291176 申请日期 2001.09.25
申请人 DAINIPPON SCREEN MFG CO LTD;KOBE STEEL LTD 发明人 MURAOKA YUSUKE;KITAKADO RYUJI;SAITO KIMITSUGU;MIZOBATA IKUO;OSHIBA HISANORI;SAKASHITA YOSHIHIKO;WATANABE KATSUMITSU;YAMAGATA MASAHIRO
分类号 B08B3/02;B05C11/10;H01L21/304;(IPC1-7):H01L21/304 主分类号 B08B3/02
代理机构 代理人
主权项
地址