| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge electrode enabled to generate a uniform discharge without damaging the material to be treated or the electrode, which does not damage the material to be treated or the electrode even when making the material to be treated or the electrode contact with and move against the electrode, and does not burden a load to a driving device, enabled to make the size big. SOLUTION: Base material of a discharge electrode is made of a metal containing aluminum on which, a porous Almite film, originated from the metal containing aluminum, is formed, and the porous Almite film contains fluorine group resin in its pores. |
