| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method where the unevenness of the surfaces of a silicon substrate and a glass substrate used for a solar battery is formed effectively obtained in a short processing time. SOLUTION: In the surface-roughening method of a substrate for a solar battery, where the surface of a silicon substrate 1 for a solar battery is roughened by using a reactive ion etching method, two high-frequency power sources 4a, 4b different in frequency are used as the high-frequency power sources, and a ruggedness configuration with the width and height of at most 2μm and the aspect ratio of at most is formed.</p> |
