发明名称 PHYSICAL QUANTITY ESTIMATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a method for precisely estimating a physical quantity by numerical calculation though a division number is not large. SOLUTION: The method estimates the physical quantity at a place to be determined by a physical law by dividing a space into meshes and obtaining the physical quantity at the intersection of the meshes by numerical calculation. The estimated value of the physical quantity at the intersection of the meshes when the division number N is finite or the coefficient value of a progression when the estimated value is given progression development are expressed to be C(N)=C0 +C1 N<α> ...(1) (α<0) as the function of the division number N, and the value of Ci (i=0, N) and the value ofαare obtained by a statistical method. Thereby, the estimated value of the physical quantity at the intersection of the meshes or the coefficient value of the series when the estimated value is given series development when the division number N is infinite are estimated as C0 .
申请公布号 JP2003099418(A) 申请公布日期 2003.04.04
申请号 JP20010288015 申请日期 2001.09.21
申请人 EBARA CORP;NIKON CORP 发明人 HASHIMOTO SUMIO
分类号 G06F17/50;G06F17/13;(IPC1-7):G06F17/13 主分类号 G06F17/50
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