| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element control device capable of a broadband high-precision driving of a piezoelectric element by drastically reduc ing an effect of a mechanical resonance frequency of the piezoelectric element. SOLUTION: The piezoelectric element control device comprises: a piezoelectric element which generates deformation by applying electric field; a piezoelectric element driving means for applying the electric field to the piezoelectric element; an electric charge amount detecting means for detecting the electric charge amount stored in the piezoelectric element and outputting a voltage signal generated by converting the detected charge amount; and a filtering means for applying a filtering treatment by gain characteristics and phase characteristics for a frequency included in nearly the same transfer function as mechanical oscillation characteristics of the piezoelectric element to the voltage signal outputted by the electric charge amount detecting means, and for outputting the result. |
