发明名称 SOLID-STATE IMAGE PICKUP DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a solid-state image pickup device where after-image quantity is reduced, and to provide a manufacturing method therefor. SOLUTION: The solid-state image pickup device is provided with a gate electrode 14 which is selectively formed on a P-type semiconductor layer 10 through a gate insulating film 12, an N-type first diffusion layer 15 formed on the surface of a semiconductor layer 10 at one end of the gate electrode 14, an N-type second diffusion layer 17 formed on the surface of the semiconductor layer 10 at the other end of the gate electrode 14, an N-type charge accumulation layer 19 which is brought into contact with the second diffusion layer 17 and is formed in the semiconductor layer 10 and a P-type surface shield layer 21 formed on the charge storage-layer 19. The impurity concentration of the charge storage layer 19 is made within the range of 1×10<16> cm<-3> to 18×10<16> cm<-3> .
申请公布号 JP2003101004(A) 申请公布日期 2003.04.04
申请号 JP20010292427 申请日期 2001.09.25
申请人 TOSHIBA CORP 发明人 IHARA HISANORI
分类号 H01L27/146;H04N5/335;H04N5/357;H04N5/369;H04N5/374;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址
您可能感兴趣的专利