发明名称 |
AUTOMATIC CONCENTRATION CONTROL DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an automatic concentration control device which is capable of keeping a solution containing salts composed of an acid and a base substantially or reversibly constant in concentration with the least amount of a replenisher, where at least either the acid or the base is volatile. SOLUTION: A solution contains salts composed of an acid and a base, where the acid and/or the base is volatile. This automatic concentration control device replenishes the above solution with a volatile acid and/or a volatile base.
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申请公布号 |
JP2003100696(A) |
申请公布日期 |
2003.04.04 |
申请号 |
JP20010294140 |
申请日期 |
2001.09.26 |
申请人 |
SONY CORP |
发明人 |
INAGAKI YASUSHI;IWAMOTO ISATO;NISHIZAKI MITSUHIRO |
分类号 |
G01N1/10;H01L21/304;(IPC1-7):H01L21/304 |
主分类号 |
G01N1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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