发明名称 AUTOMATIC CONCENTRATION CONTROL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an automatic concentration control device which is capable of keeping a solution containing salts composed of an acid and a base substantially or reversibly constant in concentration with the least amount of a replenisher, where at least either the acid or the base is volatile. SOLUTION: A solution contains salts composed of an acid and a base, where the acid and/or the base is volatile. This automatic concentration control device replenishes the above solution with a volatile acid and/or a volatile base.
申请公布号 JP2003100696(A) 申请公布日期 2003.04.04
申请号 JP20010294140 申请日期 2001.09.26
申请人 SONY CORP 发明人 INAGAKI YASUSHI;IWAMOTO ISATO;NISHIZAKI MITSUHIRO
分类号 G01N1/10;H01L21/304;(IPC1-7):H01L21/304 主分类号 G01N1/10
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