ALIPHATIC POLYIMIDE COMPOSITION AND IMAGE FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an aliphatic polyimide composition and an image forming method. SOLUTION: The aliphatic polyimide composition is a solvent-soluble copolymerized aliphatic polyimide composition comprising a solvent-soluble polyimide obtained by polycondensing an aliphatic tetracarboxylic acid dianhydride and an aliphatic diamine and exhibiting positive photosensitivity in the presence of a photo-acid generator. The composition has high transparency to short-wavelength light of <=365 nm such as i-line and gives a very good pattern with submicron resolution excellent in adhesion to a substrate by alkali development. The photosensitive aliphatic copolymerized polyimide can widely be utilized in the field of production of a semiconductor, electronic parts, etc.