METHOD FOR FORMING PATTERN AND PRESSURE SENSITIVE ADHESIVE SHEET FOR METAL FILM PATTERNING

摘要

PROBLEM TO BE SOLVED: To provide a method for patterning a metal film that facilitates peeling and the cost of which is low. SOLUTION: On the surface of a base where an aluminum thin film 3 as a first material and a polyimide film 4 as a second material different from the first material are exposed, a metal film 5 is formed and when patterning of the metal film 5 is carried out in such a way that the metal film 5 located on the aluminum thin film 3 is left and the metal film 5 located on the polyimide film 4 is peeled, a pressure sensitive adhesive sheet 8 is used to peel the metal film 5 and the surface is irradiated with reactive ions or radicals for refining as a process for preventing the metal film 5 from being peeled from the aluminum thin film 3 and for facilitating peeling on the surface of the polyimide film 4, then the desired metal film 5 is formed and the pressure sensitive adhesive sheet 8 is peeled off after it is pasted thereto.