MANUFACTURING METHOD FOR HIGH INTEGRATED SUPERCONDUCTING CIRCUIT

摘要

PROBLEM TO BE SOLVED: To separate a superconducting junction using a simple means with uniform inductance distribution, regardless of the position deviation of the upper superconducting electrode. SOLUTION: A lower superconducting electrode 2 is made of an oxide superconductor on a base substrate 1, and an interlayer insulating film 3 is formed on the lower superconducting electrode 2; and the interlayer insulating film 3 and the lower superconducting electrode 2 are processed in a base shape of a lamp edge structure and an upper superconducting electrode 5 is formed to form a superconducting junction 6, at a part where it comes into contact with the lower superconducting electrode 2. The upper superconducting electrode 5 is processed into a linear shape extending beyond the base-shaped lower superconducting electrode 2 and interlayer insulating film 3 and the linear upper superconducting electrode 5 reaching the top surface of the base-shaped interlayer insulating film 3 is polished away to separate the superconducting junction 6.