| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a support container that improves the cooling speed of a ceramic substrate having a resistance electrical heating element, and a semiconductor-manufacturing/inspecting apparatus where the ceramic substrate is supported and fixed to the support container in the manufacturing/inspecting process of a semiconductor product. SOLUTION: In a support container 10 for supporting a ceramic substrate 21, a flat body 12 is provided integrally or separately inside an outer frame 11, a coolant supply pipe 14 is fixed to the flat body 12, and at the same time an opening 20 is formed in the flat body 12 around the coolant supply pipe 14.</p> |
