| 发明名称 |
ALIGNER, ITS CONTROLLING METHOD, AND DEVICE MANUFACTURING METHOD |
| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time for parameter setting in an aligner to operate according to a plurality of parameter values. SOLUTION: The time for parameter setting is shortened by defining at least two parameters by using a common equation in a parameter setting areas (403) on a parameter setting screen (400).
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| 申请公布号 |
JP2003100603(A) |
申请公布日期 |
2003.04.04 |
| 申请号 |
JP20010291853 |
申请日期 |
2001.09.25 |
| 申请人 |
CANON INC |
发明人 |
MOTOKI TOSHIHIKO |
| 分类号 |
G03F7/20;H01L21/027;(IPC1-7):H01L21/027 |
主分类号 |
G03F7/20 |
| 代理机构 |
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