DEVICE AND METHOD FOR OPTICALLY SCANNING A SUBSTRATE DISK

摘要

The invention relates to an optical scanning system (1) for a substrate disk, comprising an image recording device (4) and an exposure device. The image recording device scans an object line (8) in an area of recording (2) on the substrate disk. The exposure device comprises a light source (10) and an optical system (3), whereby said optical system (3) is adapted to direct the light emitted by the light source (10) as a linear exposure area onto the position of the object line (8) and evenly distributed across the entire length of the object line (8) to be recorded.