Laserkondensor und Laserbearbeitungseinrichtung

摘要

A laser condenser 14 comprises a plurality of laser light sources 22, a reflective type spatial light modulator 38 for modulating laser light beams L in order to correct the wavefronts of the respective laser light beams L output from the laser light sources 22, and a condenser lens 40 for condensing the laser light beams L output from the reflective type spatial light modulator 38. The laser light with a wavefront aligned by the reflective type spatial light modulator 38 is condensed by the condenser lens, and thus laser light with a small focal spot and high energy density is obtained.