FIELD EMISSION-TYPE ELECTRON SOURCE

摘要

PURPOSE: A field emission-type electron source is provided to suppress deterioration of electron emission characteristics and achieve enhanced thermal resistance. CONSTITUTION: A field emission-type electron source(10) comprises a lower electrode(2), an electron transit layer(6) formed on the lower electrode and composed of a composite nanocrystal layer including polycrystalline silicon and a number of nanocrystalline silicon residing adjacent to a grain boundary of the polycrystalline silicon, and a surface electrode(7) formed on the electron transit layer, in which the field emission-type electron source is adapted to allow an electron passing through the electron transit layer to be emitted through the surface electrode, wherein at least a portion of the surface electrode is made of layer-structured conductive carbide or layer-structured conductive nitride.