TFT FOR DISPLAY USING POLYSILICON AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A TFT for display using polysilicon and a fabricating method thereof are provided to simplify a fabricating method of the TFT for display by using polysilicon having a uniform characteristic. CONSTITUTION: An amorphous silicon layer(200) is formed on an upper portion of a substrate(100). A low reflective coating layer(300) is formed on an upper portion of the amorphous silicon layer(200). An excimer laser beam is irradiated on the low reflective coating layer(300) and the amorphous silicon layer(200). A liquified region(210) is locally formed on the amorphous silicon layer(200) by irradiating the excimer laser beam. A non-liquified region(220) is formed at both sides of the liquified region(220). A polysilicon layer is formed by cooling the amorphous silicon layer(200).