| 摘要 |
PROBLEM TO BE SOLVED: To shorten the test time without alterations in setting of analysis at every redundant constitution in performing redundancy analysis of a semiconductor device having one or more types of redundant constitution. SOLUTION: A failure analyzing part 108 includes a selector 10 for switching failure information A sent from a pattern comparing part 107, pre-catch RAM 120, 121, 122, etc., (first storage means) for taking the switched failure information and temporarily storing the same, and failure analysis memories 130, 131, 132, etc., (second storage means) for storing the failure information transferred from these pre-catch RAMs and using the same for failure analysis. Plural sets of combination of the pre-catch RAM and the failure analysis memory above the number of types of redundant constitution are provided, where by the failure information is switched at every redundant constitution and transmitted to each pre-catch RAM, and in each failure analysis memory, failure information is analyzed.
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