| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid drop ejection head which is highly accurate, highly reliable and highly dense by allowing a highly reliable bonding at a low temperature. SOLUTION: A first substrate 1 and a second substrate 2 are bonded together via a silicon oxide film 20 containing phosphor and/or boracic acid, and are coated with a silicon nitride film 22 so that the silicon oxide film 20 is not exposed in a vibrating chamber 21.
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