SURFACE INSPECTION METHOD AND DEVICE OF OBJECT USING IMAGE PROCESSING

摘要

PURPOSE: A surface inspection method and device of an object using image processing is provided to execute a surface inspection of the object without a skilled inspector and easily determine a proper wavelength band in obtaining an image. CONSTITUTION: An inspection method for inspecting a surface condition of an object for inspection comprises an illumination optical system(400) including a first light source for irradiating a surface of the object from an oblique direction with first light, and a second light source for irradiating the surface of the object from a substantially perpendicular direction with second light whose principal spectrum range is in longer wavelengths than the first light; an imaging device(200) for capturing a first image including image components relating to at least two color components included in the first light and for capturing a second image relating to the second light; and a region-identifying section for identifying a specific color region having a specific color on the surface of the object on the basis of the first image and the second image.