ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a means for performing the correction of the thickness of an analyzing place and accurate EDX mapping in a case for performing the EDX analysis of a sample by an analyzing electron microscope. SOLUTION: The EELS analysis of the same place is also performed simultaneously with EDX analysis and the thickness of the analyzing place is corrected on the basis of the thickness data obtained by EELS. There is effect capable of obtaining accurate EDX mapping wherein the thickness of the sample is corrected and the fluctuations of a probe current during mapping are also corrected.