| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring system in which the surface of an object to be measured such as a packaging circuit board or the like is optically scanned and the deformation of parts or the like is inspected based on the reflective light therefrom, and also provide a method using the same. SOLUTION: Laser beams La, Lb irradiated from a plurality of laser elements 1a, 1b having different wavelengths are incident upon the external collective surface 5a of a polygon mirror 5 through slightly shifting optical axes thereof. The two lights La, Lb which are reflected and deflected by the polygon mirror 5 scan optically the surface 11 of the object 10 to be scanned, through a fθlens system 6 with a predetermined pitch T at the same time. While moving the object 10 toward the direction orthogonal to the scanning direction, the laser beams Lra, Lrb, having different wavelengths, which are reflected from the surface 11 of the object 10 are individually separated through spectroscopes 14 and detected with photodetectors 15, 16, and then converted into height signals by calculating devices 17, 18.
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