Infrared ray detector having a vacuum encapsulation structure

摘要

An infrared ray detector includes an array of pixels each including a micro-bridge structure wherein a diaphragm is supported in spaced relationship with a substrate by a beam structure. Each pixel has a vacuum encapsulation structure supported in a base area wherein the beam structure is supported by the substrate. The vacuum encapsulation structure includes a window film encapsulating first and second vacuum spaces formed by removing first and second sacrificial films sandwiching therebetween the diaphragm.