发明名称 Piezoelectric/electrostrictive device
摘要 A piezoelectric/electrostrictive device has a piezoelectric/electrostrictive element which is formed on a ceramic substrate. The ceramic substrate includes a plate section, a movable section, and a fixed section. The piezoelectric/electrostrictive element has one electrode and the other electrode which are alternately stacked to give a comb-shaped cross section while the one electrode and the other electrode are superimposed with each other with piezoelectric/electrostrictive layers interposing therebetween. The first layer of the piezoelectric/electrostrictive layers includes a first portion of a first piezoelectric/electrostrictive material formed over a region ranging from a part of the thin plate section to a part of the fixed section, and a second portion of a second piezoelectric/electrostrictive material formed on another part of the fixed section.
申请公布号 US2003062806(A1) 申请公布日期 2003.04.03
申请号 US20020236865 申请日期 2002.09.06
申请人 NGK INSULATORS, LTD. 发明人 IKEDA KOJI;SHIBATA KAZUYOSHI
分类号 H01L41/083;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/24;H02N2/00;(IPC1-7):H01L41/08 主分类号 H01L41/083
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