发明名称 |
Fabrication of stacked photonic lightwave circuits |
摘要 |
We propose a technique for fabricating stacked photonic lightwave circuits (PLCs), with both high and low refractive index steps, comprising the use of etched PECVD dielectric layers for the light guiding structures and which are surrounded and separated by an interlayer PLC cladding (IPC) comprising a non-conformal layer of sol-gel, whose composition, refractive index and thickness can be tailored to the requirements of the device.
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申请公布号 |
US2003063836(A1) |
申请公布日期 |
2003.04.03 |
申请号 |
US20020245552 |
申请日期 |
2002.09.17 |
申请人 |
LAM YEE LOY;TAN PEI WEI;LIM HWI SIONG;CHAN YUEN CHUEN |
发明人 |
LAM YEE LOY;TAN PEI WEI;LIM HWI SIONG;CHAN YUEN CHUEN |
分类号 |
G02B6/12;G02B6/132;G02B6/136;G02B6/138;G02B6/28;G02B6/34;(IPC1-7):G02B6/12;G02B6/26 |
主分类号 |
G02B6/12 |
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