Verfahren zur Herstellung einer flacheren Dünnfilm-Struktur,申请号DE19956027695T-传众专利搜索

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发明名称	Verfahren zur Herstellung einer flacheren Dünnfilm-Struktur
摘要
申请公布号	DE69527695(T2)	申请公布日期	2003.04.03
申请号	DE19956027695T	申请日期	1995.11.30
申请人	AIWA CO., LTD.	发明人	WATTERSTON, JAMES
分类号	G03F7/26;G03F7/00;G03F7/09;G11B5/31;(IPC1-7):G11B5/31	主分类号	G03F7/26
代理机构		代理人
主权项
地址

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