METHOD FOR SCRIBING SUBSTRATE OF BRITTLE MATERIAL AND SCRIBER

摘要

A mother glass substrate is heated continuously by a first laser spot(LS1)to a temperature lower than the softening point of the mother glass substrate along a scribing intended line(SL)along which a scribing line is intended to be formed on the surface of the mother glass substrate.A region near the first laser spot(LS1)is cooled continuously along the scribing intended line(SL).A region on the opposite side to the first laser spot(LS1)and near the cooled region is heated continuously by a second laser spot(LS2)to a temperature lower than the softening point of the mother glass substrate along the scribing intended line(SL).