GRAPHITE NANO-FIBER FILM DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a graphite nano-fiber film deposition apparatus which can allow pure graphite nano-fibers to grow directly on a sample substrate. SOLUTION: In the graphite nano-fiber film deposition apparatus, an introduction pipe for mixing a gaseous hydrogen and a gaseous carbon monoxide as a raw gas and introducing the mixture gas in a decompression tank is wound at least by one turn in the decompression tank.