COATING LIQUID FOR FORMING DIELECTRIC FILM OF PEROVSKITE STRUCTURE AND METHOD OF FORMING DIELECTRIC FILM OF PEROVSKITE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a coating liquid for forming a thin dielectric film of a perovskite structure which is capable of manufacturing a thin and dense oxide film of a large film thickness by one time of deposition and firing operation by a solution coating applying and firing process and a method of forming the dielectric film of the perovskite structure. SOLUTION: The coating liquid for forming the dielectric film of the perovskite structure prepared by incorporating a dielectric oxide component of the perovskite structure as a raw material of dielectric oxide of the perovskite structure in a solution essentially consisting of alcohol and incorporating 30 to 100 mass% hydroxypropyl cellulose in the dielectric oxide component of the perovskite structure and the method of forming the dielectric film of the perovskite structure using the same are provided.