OPTICAL MULTILAYER INTERFERENCE FILM, METHOD FOR MANUFACTURING THE SAME AND FILTER USING OPTICAL MULTILAYER INTERFERENCE FILM

摘要

PROBLEM TO BE SOLVED: To provide an optical multilayer interference film having excellent productivity and little optical loss by scattering or absorption of light and showing desired optical characteristics and a method for manufacturing the film and to provide a filter using the above optical multilayer interference film. SOLUTION: The optical multilayer interference film 11 has low refractive index films 2 and high refractive index films 1 alternately layered on a transparent base body 10 and at least one layer of the high refractive index films 1 is a high refractive index oxide film having an amorphous structure deposited by sputtering a reduction type oxide target as the source material.