| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for high-speed shape measurement by applying a phase shift method to an entity grid-type moire method and then obtaining a phase shifted image via a single series of imaging. SOLUTION: This method uses an entity grid-type moire optical system to exactly shift a specific fringe order moire fringes by desired phase, and limits its measuring area to the vicinity of the fringe order, performing three- dimensional measurement of surface shape of a specimen from at least three phase-shifted moire fringes data. In order to input an image of the shifted moire fringes into a photo acceptance unit 14, a lattice pattern 12 with different pitch. The measuring head 10 comprises a light source 11, the lattice pattern 12, the photo acceptance unit 14, and a lens 13. The interaction between the measuring head 10 including the optical system and the planate specimen 15 contains a mechanism for transferring in a certain direction.
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