| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for detecting the surface or internal information of a sample in a photoacoustic signal detection technology, in which two-dimensional internal information of the sample can be detected at a high rate through a simple arrangement without being influenced by the reflectivity distribution or irregularities distribution on the surface of the sample. SOLUTION: Stripe inspection areas of a sample are excited simultaneously by a stripe excitation beam 101 and interference of light is utilized for detecting photoacoustic signals generated at respective points thus detecting interfering lights simultaneously in parallel. According to such arrangements 201 and 202, photoacoustic signals in the stripe inspection areas of the sample can be detected simultaneously in parallel. Since photoacoustic signals in the stripe inspection areas of the sample can be detected simultaneously in parallel, two-dimensional surface and internal information of the sample can be detected at a high rate. Furthermore, since a photoacoustic signal subjected to correction of reflectivity distribution, irregularities distribution on the surface of the sample and fluctuation of optical path can be detected, stabilized high sensitivity detection can be ensured.
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