发明名称 |
Semiconductor device e.g. acceleration sensor has substrate provided with circuit that is electrically connected to signal output chip that outputs predetermined signals |
摘要 |
A substrate (14) has a microstructure chip (11) circuit electrically connected to an application specific integrated circuit (ASIC) signal output chip that has several semiconductors to output predetermined signals. The voltage level of the substrate is fixed to ground level. |
申请公布号 |
DE10235442(A1) |
申请公布日期 |
2003.04.03 |
申请号 |
DE2002135442 |
申请日期 |
2002.08.02 |
申请人 |
MITSUBISHI DENKI K.K., TOKIO/TOKYO |
发明人 |
OTANI, HIROSHI |
分类号 |
G01P15/125;B81B7/00;G01P15/08;H01L23/495;H01L23/50;H01L23/552;H01L23/58;H01L23/60;H01L25/00;H01L25/04;H01L25/18;H01L29/84 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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