发明名称 Semiconductor device e.g. acceleration sensor has substrate provided with circuit that is electrically connected to signal output chip that outputs predetermined signals
摘要 A substrate (14) has a microstructure chip (11) circuit electrically connected to an application specific integrated circuit (ASIC) signal output chip that has several semiconductors to output predetermined signals. The voltage level of the substrate is fixed to ground level.
申请公布号 DE10235442(A1) 申请公布日期 2003.04.03
申请号 DE2002135442 申请日期 2002.08.02
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO 发明人 OTANI, HIROSHI
分类号 G01P15/125;B81B7/00;G01P15/08;H01L23/495;H01L23/50;H01L23/552;H01L23/58;H01L23/60;H01L25/00;H01L25/04;H01L25/18;H01L29/84 主分类号 G01P15/125
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