发明名称 METHOD AND DEVICE FOR SHAPE MEASURING, STORAGE MEDIUM STORING COMPUTER PROGRAM FOR SHAPE MEASURING, AND COMPUTER PROGRAM FOR SHAPE MEASURING
摘要 PROBLEM TO BE SOLVED: To provide a method and a device for shape measuring capable of accurately detecting an initial position of a probe even if the probe vibrates in a machine resonant frequency to shorten measuring time, as well as making every effort to inhibit any disadvantage such as its structural complexity or others, etc., due to the above measuring operation. SOLUTION: In performing a shape measuring method so that a detecting means 3 detects the displacement of the contact type probe brought in contact with a surface to be measured from its initial position to measure the shape of the surface, an operation processing is provided in order to detect the displacement of the probe through the detecting means 3 and then obtain a signal which may be considered as the initial position of the probe for its output signal. Thus the initial position of the probe can accurately be detected in a short time only by using the operation processing without changing mechanism of the probe.
申请公布号 JP2003097940(A) 申请公布日期 2003.04.03
申请号 JP20010290177 申请日期 2001.09.21
申请人 RICOH CO LTD 发明人 TAKAHASHI MINORU
分类号 G01B21/20;(IPC1-7):G01B21/20 主分类号 G01B21/20
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