| 摘要 |
PROBLEM TO BE SOLVED: To accurately move an inspection probe to an inspection point of a circuit board. SOLUTION: This circuit board inspection device includes a first reference scale 3a disposed in parallel to X-axis in an actual X-Y coordinate plane and having a scale in the X-axis direction including a base point scale B, and a ROM 11b storing the respective coordinate values in a virtual X-Y coordinate plane corresponding to each position of each inspection point and the position of the base point scale B. A control device 11 moves a first camera on the coordinates of the base point scale B in the virtual X-Y coordinate plane, detects a positional shifting of the base point scale B according to an image pickup signal of the first camera, moves the first camera along the first reference scale 3a by a designated distance, detects the moving distance on the actual X-Y coordinate plane, calculates the coefficient of correction for correcting the moving amount in the virtual X-Y coordinate plane according to the moving distance and the designated distance, and corrects the moving amount of a first Y-axis moving mechanism according to the coefficient of correction.
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