发明名称 VACUUM GATE VALVE
摘要 PROBLEM TO BE SOLVED: To prevent a valve plate support body 20 from following even when inside pressure of a valve box 1 is atmospheric and pressure in the same direction acts on a valve plate 5, in a vacuum gate valve G comprising: the valve box 1 communicating with a vacuum container C1; the valve plate support body 20 that can move between a valve open position and a valve close position in a direction approximately in parallel with an opening 2 of the vacuum container C1 inside the valve box 1; a drive means 31 for moving the valve plate support body 20;, and the valve plate 5 being supported by the valve plate support body 20 in a contacting/detaching manner via a parallel link mechanism 44 having a pair of links 45 and contacting/detaching from the valve plate support body 20 at the valve open position of the valve plate support body 20 for opening/closing the opening 2 of the vacuum container C1. SOLUTION: When pressure in the same direction acts on the valve plate 5 in a state that the valve plate 5 closes the opening 2 of the vacuum container C1, the valve plate 5 is made to move in a relatively closing direction for the valve plate support body 20 by a rear side link shaft inserting hole 45a made of a long hole formed on the links 45.
申请公布号 JP2003097735(A) 申请公布日期 2003.04.03
申请号 JP20010294995 申请日期 2001.09.26
申请人 SHIN MEIWA IND CO LTD 发明人 IWASAKI YASUKUNI;MIKI MASAMINE
分类号 F16K3/18;(IPC1-7):F16K3/18 主分类号 F16K3/18
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