发明名称 Semiconductor device and method of manufacturing the same
摘要 In the present invention, the bonding pad is formed in a lattice-like shape. Directly underneath the passivation layer, the etching stopper layer is provided. An opening is made through the passivation layer and the etching stopper layer so as to expose the bonding pad. The cavity sections of the lattice-like shape of the bonding pad are filled with the insulating layer. The bonding wire is connected to the lattice-shaped bonding pad. With this structure, the bonding error of the device manufactured by the damascening process can be avoided.
申请公布号 US2003062625(A1) 申请公布日期 2003.04.03
申请号 US20020283253 申请日期 2002.10.30
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ANAND MINAKSHISUNDARAN BALASUBRAMANIAN
分类号 H01L23/52;H01L21/3205;H01L21/60;H01L23/485;(IPC1-7):H01L23/48 主分类号 H01L23/52
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