METHOD AND APPARATUS FOR SUPPORTING A POLISHING WEB

摘要

Generally, a method and apparatus for supporting a web of polishing material 102. In one embodiment, the apparatus includes a platen 230 and a blocker valve 314. The platen includes a support surface adapted to support the polishing material and a port 284 fluidly coupled to the support surface. A housing that includes a supply port 304 and an exit port 306 has a venturi body 310 disposed therein. The blocker valve has a first state whereby a flow through the housing and blocker valve causes vacuum to be drawn through the port disposed in the platen by the venturi body. In another embodiment, the flow through the venturi 310 may be reversed by changing the state of the blocker valve to blow air through the port 284 disposed in the platen, thereby placing the polishing material and the support surface of the platen in a spaced-apart relation.