MATRIX TYPE PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE AND ITS MANUFACTURING METHOD

摘要

A matrix type piezoelectric/electrostrictive device (1) driven by the displacement of a piezoelectric/ electrostrictive element (4) with piezoelectric/ electrostrictive elements (31) having the piezoelectric/ electrostrictive element (4) and at least a pair of electrodes (18, 19) disposed upright on a thick ceramic substrate (2). This matrix type piezoelectric/ electrostrictive device (1) is characterized by keeping the piezoelectric/electrostrictive elements (31) coupled integrally with the ceramic substrate (2) and independently arrayed in two dimensions to form a pair of electrodes (18, 19) on the side face of the piezoelectric/electrostrictive element (4). The state of crystal grains of the face with the electrodes (18, 19) out of the side faces of the piezoelectric/electrostrictive element (4) shows that 10% or less of crystal grains undergo transcrystalline cracks. A vicinity of the junction of the pieaoelectric/electrostrictive element (4) with the ceramic substrate (2) forms a curved face,(13). This constitution provides a low−voltage and large displacement, high response speed, large generation power, excellent mountability, and higher integration.