| 摘要 |
<p>A wafer cassette transport cart and fault-tolerant self-correcting block help a wafer cassette to properly seat on the pickup forks of the wafer cassette transport cart. The block has a lower surface to mount to the cart and an angled upper surface to meet a front bottom edge of a wafer cassette. The angled upper surface causes an improperly positioned wafer cassette to slide to a proper seating position on the cart when the wafer cassette is lowered onto the cart. The fault-tolerant self-correcting block is fabricated from clean-room compatible materials and the upper angled upper surface may have a low-resistance coating.</p> |
