DEFECT INSPECTION APPARATUS

摘要

A defect inspection apparatus includes moving means for rectilinearly moving a sample at a constant velocity at least in one direction at an inspection position, illumination means for illuminating a front surface and back surface of the sample moved by the moving means, image pickup means for picking up the entire front surface and the entire back surface of the sample illuminated by the illumination means and moved at the constant velocity, and defect inspection means for performing image processing of image data of the entire front surface and the entire back surface of the sample acquired by the image pickup means, so as to inspect whether the front surface and the back surface of the sample have any defect.