| 摘要 |
PROBLEM TO BE SOLVED: To prevent any ozone from generating in a space surrounded by an annular waveguide and a hollow body. SOLUTION: In a plasma treatment apparatus in which the microwave is fed from the annular waveguide into the hollow body via an opening antenna to generate plasma in the hollow body, a gas feeding means to feed an inert gas, a gaseous nitrogen, or a mixture gas thereof is provided between the annular waveguide and the hollow body. In addition, in a plasma treatment method in which the microwave is fed from the annular waveguide into the hollow body via an aperture antenna of the annular waveguide to generate plasma in the hollow body, the microwave is fed from the aperture antenna of the annular waveguide to a space between the annular waveguide and the hollow body after an inert gas, a gaseous nitrogen, or a mixture gas thereof are provided in the space between the annular waveguide and the hollow body. |
