METHOD FOR MANUFACTURING YTTRIA-ALUMINA COMPLEX OXIDE FILM, YTTRIA-ALUMINA COMPLEX OXIDE FILM, FLAME SPRAYED FILM, CORROSION RESISTANT MEMBER AND LOW PARTICLE MEMBER

摘要

PROBLEM TO BE SOLVED: To provide an yttria-alumina complex oxide film having a high peel strength to the substrate of the film. SOLUTION: A flame sprayed film consisting of the yttria-alumina complex oxide is manufactured by flame spraying the mixture of an yttria powder and an alumina powder onto the substrate. Preferably 50% of the yttria powder has an average particle diameter of not less than 0.1 μm and not more than 100 μm, and 50% of the alumina powder has an average particle diameter of not less than 0.1 μm and not more than 100 μm. The yttrium-alumina complex oxide preferably contains at least a garnet phase and further a perovskite phase.