SEMICONDUCTOR CHEMICAL SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor chemical sensor in which sensitiveness characteristics and durability are enhanced by enhancing the exfoliation resistance of an ion sensitive film without causing complication of the manufacturing process. SOLUTION: The semiconductor chemical sensor comprises a semiconductor substrate 1 where a drain region 11 and a source region 12 are formed on the major surface side while being spaced apart from each other, an insulation film 2 formed on the major surface of the semiconductor substrate 1 while making thin the parts corresponding to a part of the drain region 11 and the source region 12 and a channel region 13 between them, and an ion sensitive film 3 of a polymer material which is sensitive selectively only to a specified substance being measured and disposed to abut against the thin part of the insulation film 2. An organic film 4 is interposed between the insulation film 2 and the ion sensitive film 3 such that it does not prevent the ion sensitive film 3 from abutting against the thin part of the insulation film 2.